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Excimer laser micromachining technology in biochip

著者名:
Chen, T. ( Beijing Polytechnic Univ. (China) )
Chen, J.M.
Zhang, Y.
Ying, B.H.
Jing, T.
Zuo, T.C.
さらに 1 件
掲載資料名:
MEMS/MOEMS Technologies and Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4928
発行年:
2002
開始ページ:
98
終了ページ:
102
総ページ数:
5
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447173 [081944717X]
言語:
英語
請求記号:
P63600/4928
資料種別:
国際会議録

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