Laser fabrication technology for micromachines
- 著者名:
- Chen, J.M. ( Beijing Polytechnic Univ. (China) )
- Chen, T.
- Wang, X.B.
- Zuo, T.C.
- 掲載資料名:
- MEMS/MOEMS Technologies and Applications
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4928
- 発行年:
- 2002
- 開始ページ:
- 93
- 終了ページ:
- 97
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447173 [081944717X]
- 言語:
- 英語
- 請求記号:
- P63600/4928
- 資料種別:
- 国際会議録
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |