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Fabrication of 1.3-μm Si-based MEMS tunable optical filter

著者名:
Zuo, Y.H. ( Institute of Semiconductors (China) )
Huang, C.J.
Cheng, B.W.
Mao, R.W.
Luo, L.P.
Gao, J.H.
Bai, Y.X.
Wang, L.Ch.
Yu, J.Zh.
Wang, Q.M.
さらに 5 件
掲載資料名:
MEMS/MOEMS Technologies and Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4928
発行年:
2002
開始ページ:
73
終了ページ:
76
総ページ数:
4
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447173 [081944717X]
言語:
英語
請求記号:
P63600/4928
資料種別:
国際会議録

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