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Maskless patterning characteristics of vanadium pentoxide amorphous films by frequency-doubled Q-switched Nd:YAG laser irradiation

著者名:
掲載資料名:
Lasers in material processing and manufacturing : 16-18 October 2002, Shanghai, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4915
発行年:
2002
開始ページ:
317
終了ページ:
325
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447043 [0819447048]
言語:
英語
請求記号:
P63600/4915
資料種別:
国際会議録

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