Simple method for separating and evaluating origins of a side error in mask CD uniformity: photomask blanks and mask-making processes
- 著者名:
Choi, Y.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Park, J.R. Sung, M.-G. Yang, S.-H. Kim, S.-H. Lee, H.-J. Lee, J.-Y. Jang, I.Y. Kim, Y.H. Choi, S.-W. Yoon, H.-S. Sohn, J.-M. - 掲載資料名:
- 22nd Annual BACUS Symposium on Photomask Technology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4889
- 発行年:
- 2002
- 巻:
- Part Two
- 開始ページ:
- 819
- 終了ページ:
- 825
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446756 [0819446750]
- 言語:
- 英語
- 請求記号:
- P63600/4889
- 資料種別:
- 国際会議録
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