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Tuning MEEF for CD control at 65-nm node based on chromeless phase lithography (CPL)

著者名:
Van Den Broeke, D.J. ( ASML MaskTools, Inc. (USA) )
Laidig, T.L.
Wampler, K.E.
Hsu, S.
Shi, X.
Hsu, M.
Burchard, P.
Chen, J.F.
さらに 3 件
掲載資料名:
22nd Annual BACUS Symposium on Photomask Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4889
発行年:
2002
巻:
Part One
開始ページ:
579
終了ページ:
591
総ページ数:
13
出版情報:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446756 [0819446750]
言語:
英語
請求記号:
P63600/4889
資料種別:
国際会議録

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