Analysis of material properties for MEMS using interferometric measurements
- 著者名:
- O'Mahony, C. ( National Microelectronics Research Ctr. (Ireland) )
- Hill, M. ( Cork Institute of Technology (Ireland) )
- Mathewson, A. ( National Microelectronics Research Ctr. (Ireland) )
- 掲載資料名:
- Opto-Ireland 2002: Optics and Photonics Technologies and Applications
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4876
- 発行年:
- 2003
- 巻:
- Part Two
- 開始ページ:
- 712
- 終了ページ:
- 722
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446572 [0819446572]
- 言語:
- 英語
- 請求記号:
- P63600/4876
- 資料種別:
- 国際会議録
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1
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