Characteristics of electric devices made by direct nanoparticle spraying
- 著者名:
- Ozawa, E. ( Vacuum Metallurgical Co., Ltd. (Japan) )
- Kawakami, Y.
- Yoshida, T.
- Iwashina, M.
- Takahashi, K.
- 掲載資料名:
- Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4830
- 発行年:
- 2003
- 開始ページ:
- 232
- 終了ページ:
- 237
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446015 [0819446017]
- 言語:
- 英語
- 請求記号:
- P63600/4830
- 資料種別:
- 国際会議録
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