High-speed noninterferometric nanotopographic characterization of Si wafer surfaces
- 著者名:
- Raymond, T.D. ( WaveFront Sciences, Inc. (USA) )
- Neal, D.R.
- Topa, D.M.
- Schmitz, T.L. ( Univ. of Florida (USA) )
- 掲載資料名:
- Nanoscale Optics and Applications
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4809
- 発行年:
- 2002
- 開始ページ:
- 208
- 終了ページ:
- 216
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445773 [0819445770]
- 言語:
- 英語
- 請求記号:
- P63600/4809
- 資料種別:
- 国際会議録
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