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Influence of photoresist feature geometry on ECR plasma-etched HgCdTe trenches

著者名:
Benson, J.D. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) )
Stoltz, A.J., Jr.
Kaleczyc, A.W. ( E-OIR Measurements, Inc. (USA) )
Martinka, M. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) )
Almeida, L.A.
Boyd, P.R. ( Army Research Lab. (USA) )
Dinan, J.H. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) )
さらに 2 件
掲載資料名:
Materials for infrared detectors II : 8-9 July 2002 ,Seattle, Washington, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4795
発行年:
2002
開始ページ:
129
終了ページ:
135
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445629 [0819445622]
言語:
英語
請求記号:
P63600/4795
資料種別:
国際会議録

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