High-resolution carbon/carbon multilayers
- 著者名:
Baranov, A.M. ( Research Institute of Vacuum Technique (Russia) ) Dietsch, R. ( Fraunhofer-Institut fuer Werkstoff-und Strahltechnik (Germany) ) Holz, T. Menzel, M. Weissbach, D. Scholz, R. ( Max-Planck-Institut fuer Mikrostrukturphysik (Germany) ) Melov, V. ( Fraunhofer-Institut fuer Zerstoerungsfreie Pruefverfahren (Germany) ) Schreiber, J. - 掲載資料名:
- X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4782
- 発行年:
- 2002
- 開始ページ:
- 160
- 終了ページ:
- 168
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445490 [0819445495]
- 言語:
- 英語
- 請求記号:
- P63600/4782
- 資料種別:
- 国際会議録
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11
国際会議録
Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
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