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Numerical analysis of scattered waves from rough surfaces with and without an object

著者名:
掲載資料名:
Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4780
発行年:
2002
開始ページ:
7
終了ページ:
14
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445476 [0819445479]
言語:
英語
請求記号:
P63600/4780
資料種別:
国際会議録

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