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Comb drives: versatile microstructures for capacitive sensing and electrostatic actuation

著者名:
掲載資料名:
European workshop on smart structures in engineering and technology : 21-23 May 2002, Presqu'île de Giens, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4763
発行年:
2003
開始ページ:
201
終了ページ:
206
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445292 [0819445290]
言語:
英語
請求記号:
P63600/4763
資料種別:
国際会議録

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