Pulsed-laser deposited TiC coatings for MEMS

Pulsed-laser deposited TiC coatings for MEMS

著者名:

Radhakrishnan, G. ( The Aerospace Corp. (USA) )
Adams, P.M.
Robertson, R.E.
Cole, R. C.

掲載資料名:

High-Power Laser Ablation IV

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4760

発行年:

2002

巻:

Part One

開始ページ:

289

終了ページ:

300

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819445247 [081944524X]

言語:

英語

請求記号:

P63600/4760

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012597
シリーズID:	PA00000029
会議名:	International Symposium on High-Power Laser Ablation
回次:	2002 : 4th
会議開催地:	Taos, NM, USA
会議開催年:	2002.04.22-2002.04.26

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4 国際会議録 Rolling Contact Fatigue of TiC-Coated Bearing Balls Radhakrishnan, G., Uht, J. C., Park, W., Hilton, M. R., Adams, P. M., Ward, P. C., Herbert, E. G., Lucas, B. N. MRS - Materials Research Society	10 国際会議録 Probing the chemical role of ambient O2 in the formation of carbon nanotubes via excimer laser ablation G. Radhakrishnan, P. M. Adams, L. S. Bernstein SPIE - The International Society of Optical Engineering
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