Laser microprocessing in microelectronics, data storage, and photonics (Invited Paper)
- 著者名:
Lu, Y.F. ( National Univ. of Singapore ) Song, W.D. Ren, Z.M. An, C.W. Liu, D.M. Huang, S.M. Wang, W.J. Hong, M.H. Chong, T.C. Cho, B.J. Zeng, J.N. Tan, C.F. - 掲載資料名:
- High-Power Laser Ablation IV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4760
- 発行年:
- 2002
- 巻:
- Part One
- 開始ページ:
- 211
- 終了ページ:
- 222
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445247 [081944524X]
- 言語:
- 英語
- 請求記号:
- P63600/4760
- 資料種別:
- 国際会議録
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4
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Characterization of modified surface of indium tin oxide film during process of laser patterning
SPIE-The International Society for Optical Engineering |
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