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LCD real-time mask technique for fabrication of arbitrarily shaped microstructure

著者名:
Peng, Q. ( Sichuan Univ. (China) )
Guo, Y.
Chen, B.
Du, J.
Xiang, J.
Cui, Z. ( Rutherford Appleton Lab. (UK) )
さらに 1 件
掲載資料名:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4755
発行年:
2002
開始ページ:
748
終了ページ:
754
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
言語:
英語
請求記号:
P63600/4755
資料種別:
国際会議録

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