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Defect dispositiong using mask printability analysis on alternating phase-shifting masks

著者名:
Chang, C.-H. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Hsieh, C.-H.
Tzu, S.-D.
Dai, C.-M.
Lin, B. J.
Pang, L. ( Numerical Technologies, Inc. (USA) )
Qian, Q.-D.
Chen, J.-H.
Huang, J. H.
さらに 4 件
掲載資料名:
Photomask and Next-Generation Lithography Mask Technology IX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4754
発行年:
2002
開始ページ:
622
終了ページ:
629
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445179 [0819445177]
言語:
英語
請求記号:
P63600/4754
資料種別:
国際会議録

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