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Carbon and ceramic microcoils for MEMS by microwave CVD

著者名:
  • Xie, J. ( The Pennsylvania State Univ. (USA) )
  • Ong, C. ( DSO National Labs. (Singapore) )
  • Varadan, V.K. ( The Pennsylvania State Univ. (USA) )
掲載資料名:
Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4700
発行年:
2002
開始ページ:
196
終了ページ:
204
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444486 [0819444480]
言語:
英語
請求記号:
P63600/4700
資料種別:
国際会議録

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