Development of micromachined RF switches with piezofilm actuation

Development of micromachined RF switches with piezofilm actuation

著者名:

Fox, C.H.J. ( Univ. of Nottingham (UK) )
Chen, X.
Jiang, H.W. ( Cranfield Univ. (UK) )
Kirby, P.B.
McWilliam, S. ( Univ. of Nottingham (UK) )

掲載資料名:

Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4700

発行年:

2002

開始ページ:

40

終了ページ:

49

総ページ数:

10

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444486 [0819444480]

言語:

英語

請求記号:

P63600/4700

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012535
シリーズID:	PA00000029
会議名:	Smart structures and materials
回次:	2002
会議開催地:	San Diego, CA, USA
会議開催年:	2002.03.18-2002.03.21

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