Monte-Carlo methods for chemical-mechanical planarization on multiple-layer and dual- material models

Monte-Carlo methods for chemical-mechanical planarization on multiple-layer and dual- material models

著者名:

Chen, Y. ( Univ.of California/Los Angeles(USA) )
Kahng, A.B. ( Univ.of California/San Diego(USA) )
Robins, G. ( Univ.of Virginia(USA) )
Zelikovsky, A. ( Georgia State Univ.(USA) )

掲載資料名:

Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4692

発行年:

2002

開始ページ:

421

終了ページ:

432

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444394 [0819444391]

言語:

英語

請求記号:

P63600/4692

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012527
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing : Design, process integration, and characterization for microelectronics
回次:	2002
会議開催地:	Santa Clara, CA, USA
会議開催年:	2002.03.06-2002.03.07

類似資料:

1 国際会議録 Automated layout and phase assignment techniques for dark-field alternating PSM Kahng,A.B., Wang,H., Zelikovsky,A. SPIE - The International Society for Optical Engineering	7 国際会議録 Design-process intergration and shared red bricks(Invited Paper) Kahng, A.B. SPIE-The International Society for Optical Engineering
2 国際会議録 Yield- and cost-driven fracturing for variable shaped-beam mask writing Kahng, A. B., Xu, X., Zelikovsky, A. SPIE - The International Society of Optical Engineering	8 国際会議録 Selectivity Studies on Tantalum Barrier Layer for Copper Chemical Mechanical Planarization Vijayakumar, A., Du, T., Sundaram, K.B., Desai, V. Electrochemical Society
3 国際会議録 Fast yield-driven fracture for variable shaped beam mask writing [6283-61] Kahng, B. A., Xu, X., Zelikovsky, A. SPIE - The International Society of Optical Engineering	9 国際会議録 Monte Carlo modeling for perfusion monitoring Dixon, B., Ibey, B.L., Ericson, M.N., Wilson, M.A., Cote, G.L. SPIE-The International Society for Optical Engineering
4 国際会議録 Performance-impact limited-area fill synthesis Chen, Y., Gupta, P., Kahng, A.B. SPIE-The International Society for Optical Engineering	10 国際会議録 Distributed sensing and probing with multiple search agents: toward system-level landmine detection solutions D.E. Franklin, A.B. Kahng, M.A. Lewis Society of Photo-optical Instrumentation Engineers
5 国際会議録 Design of integrated-circuit interconnects with accurate modeling of chemical-mechanical pianarization He, L., Kahng, A. B., Tam, K. H., Xiong, J. SPIE - The International Society of Optical Engineering	11 国際会議録 Evaluation of multiple-scattering influence on lidar measurement by itinerative Monte Carlo method Wang, X., Boselli, A., Bruscaglioni, P., D'Avino, L., Gambacorta, A., Ismaelli, A., Velotta, R., Zaccanti, G. SPIE - The International Society of Optical Engineering
6 国際会議録 Layer-specific illumination optimization by Monte Carlo method Kim, H.-C., Nam, D.-S., Hwang, C., Kang, Y.S., Woo, S.-G., Cho, H.-K., Han, W.-S. SPIE-The International Society for Optical Engineering	12 国際会議録 Chemical mechanical planarization process induced within lot overlay variation in 0.20-μm DRAM: solution and simulation model Chen,C.P.A., Huang,B., Lee,W., Chung,W.J., Hou,T.K. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12