Improving device performance and process manufacturability through the use of TCAD
- 著者名:
- Liu K.P. ( Texas Instruments Inc.(USA) )
- Wu, J.Z.
- Chen, J.H.
- Jain, A.
- Mehrotra, M.
- 掲載資料名:
- Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4692
- 発行年:
- 2002
- 開始ページ:
- 411
- 終了ページ:
- 420
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444394 [0819444391]
- 言語:
- 英語
- 請求記号:
- P63600/4692
- 資料種別:
- 国際会議録
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