SEM review and discrete inspection of optically invisible defects in a production environment
- 著者名:
Hinschberger, B. ( STMicroelectronics (France) ) Gomber, C. Ithier, L. ( Applied Materials (France) ) Couturier, L. Sherman, B. ( Applied Materials (Israel) ) Rothlevi, O. Ben-Porath, A. - 掲載資料名:
- Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4692
- 発行年:
- 2002
- 開始ページ:
- 162
- 終了ページ:
- 167
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444394 [0819444391]
- 言語:
- 英語
- 請求記号:
- P63600/4692
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
11
国際会議録
Review and characterization of defects after automatic optical inspection on patterned wafers
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |