Defect detection for short-loop process and SRAM-cell optimization by using addressable failure site-test structures(AFS-TS)
- 著者名:
Doong, K.Y.-Y. ( Taiwan Semiconductor Manufacturing Co., Ltd. and National Tsing-Hua Univ. (Taiwan) ) Hsieh, S. ( Taiwan Semiconductor Manufacturing Co., Ltd. ) Lin, S.C. Wang, J.R. ( National Tsing-Hua Univ. (Taiwan) ) Shen, B. ( Taiwan Semiconductor Manufacturing Co., Ltd. ) Hung, L.J. Guo, J.C. Chen, I.C. Young, K.L. Hsu, C.C.-H. ( National Tsing-Hua Univ.(Taiwan) ) - 掲載資料名:
- Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4692
- 発行年:
- 2002
- 開始ページ:
- 81
- 終了ページ:
- 87
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444394 [0819444391]
- 言語:
- 英語
- 請求記号:
- P63600/4692
- 資料種別:
- 国際会議録
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