Aberration sensitivity control for the isolation layer in low-k1 DRAM process
- 著者名:
Cho, B.-H. ( Hynix Semiconductor Inc. (Korea) ) Yim, D. Park, C.-H. Lee, S.-H. Yang, H.-J. Choi, J.-H. Shin, Y.-C. Kim, C.-D. Choi, J.-S. Kang, K.-O. Kim, S.-W. Yu, T.-H. Hong, J. Kim, J.-C. Han, M.-S. Heo, H.-Y. Kim, Y.-D. Lee, D.-D. Yoon, G.-H. van schoot, J.B. ( ASML (Netherlands) ) Theeuwes, T. ( ASML (Korea) ) Min, Y.-H. - 掲載資料名:
- Optical Microlithography XV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4691
- 発行年:
- 2002
- 巻:
- Part Two
- 開始ページ:
- 831
- 終了ページ:
- 839
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- 言語:
- 英語
- 請求記号:
- P63600/4691
- 資料種別:
- 国際会議録
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SPIE - The International Society of Optical Engineering |
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SPIE - The International Society of Optical Engineering |
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