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Subresolution assist feature implementation for high-performance logic gate-level lithography

著者名:
Gabor, A.H. ( IBM Microelectronics (USA) )
Bruce, J.
Chu, W.
Ferguson, R.
Fonseca, C.A.
Gordon, R.L.
Jantzen, K.
Khare, M.
Lavin, M.
Lee, W.-H.
Liebmann, L.W.
Muller, k.P.
Rankin, J.
Varekamp, P.
Zach, F.X.
さらに 10 件
掲載資料名:
Optical Microlithography XV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4691
発行年:
2002
巻:
Part One
開始ページ:
418
終了ページ:
425
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
言語:
英語
請求記号:
P63600/4691
資料種別:
国際会議録

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