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Assessment of OPC effectiveness using two-dimensional metrics

著者名:
Wiaux, V. ( IMEC (Belgium) )
Philipsen, V.
Jonckheere, R.
Vandenberghe, G.
Verhaegen, S.
Hoffmann, T.
Ronse, K.
Howard, W.B. ( KLA-Tencor Corp. (USA) )
Maurer, W.
Preil, M.E.
さらに 5 件
掲載資料名:
Optical Microlithography XV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4691
発行年:
2002
巻:
Part One
開始ページ:
395
終了ページ:
406
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
言語:
英語
請求記号:
P63600/4691
資料種別:
国際会議録

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