Blank Cover Image

Model-based design improvements for the 100-nm lithography generation

著者名:
Lucas, K. ( Motorola (USA) )
Postnikov, S.V.
Patterson, K.
Yuan, C.-M.
Thomas, C.
Thompson, M.A.
Carter, R.
Litt, L.C.
Montgomery, P.K. ( Motorola (USA) )
Wimmer, K. ( Motorola (USA) )
さらに 5 件
掲載資料名:
Optical Microlithography XV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4691
発行年:
2002
巻:
Part One
開始ページ:
215
終了ページ:
226
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
言語:
英語
請求記号:
P63600/4691
資料種別:
国際会議録

類似資料:

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Patterson, K., Litt, L.C., Maltabes, J.G., Hughes, G.P., Robertson, T., Montgomery, B.

SPIE-The International Society for Optical Engineering

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Trouiller, Y., Postnikov, S.V., Lucas, K.D., Sundermann, F., Patterson, K., Belledent, J., Couderc, C., Rody, Y.F.

SPIE - The International Society of Optical Engineering

Postnikov,S.V., Lucas,K., Wimmer,K.

SPIE-The International Society for Optical Engineering

Kasprowicz, B.S., Conley, W.E., Litt, L.C., Van Den Broeke, D.J., Montgomery, P.K., Socha, R.J., Wu, W., Lucas, K.D., …

SPIE - The International Society of Optical Engineering

Postnikov, S.V., Lucas, K., Garza, C.M., Wimmer, K., LaCour, P., Word, J.C.

SPIE-The International Society for Optical Engineering

Montgomery, P.K., Lucas, K.D., Litt, L.C., Conley, W., Fanucchi, E., Van Wingerden, J., Vandenberghe, G., Wiaux, V., …

SPIE - The International Society of Optical Engineering

Conley, W., Montgomery, P.K., Lucas, K., Litt, L.C., Maltabes, J.G., Dieu, L., Hughes, G.P., Mellenthin, D.L., Socha, …

SPIE-The International Society for Optical Engineering

Postnikov, S.V., Lucas, K., Wimmer, K., Ivin, V., Rogov, A.

SPIE-The International Society for Optical Engineering

Postnikov,S.V., Lucas,K.D., Roman,B.J., Wimmer,K.

SPIE - The International Society for Optical Engineering

Montgomery, P.K., Vandenberghe, G., Lucas, K.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12