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Contact hole resolution enhancement by post exposure amine treatment (CONPEAT) process

著者名:
Koh, C.-W. ( Hynix Semiconductor, Inc. (Korea) )
Kim, J.-S.
Choi, C.-I.
Eom, T.-S.
Kwon, W.-T.
Jung, J.-C.
Bok, C.-K.
Shin, K.-S.
さらに 3 件
掲載資料名:
Advances in Resist Technology and Processing XIX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4690
発行年:
2002
巻:
Part Two
開始ページ:
793
終了ページ:
798
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444363 [0819444367]
言語:
英語
請求記号:
P63600/4690
資料種別:
国際会議録

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