Synthesis of novel fluoropolymers for 157-nm photoresists by cyclopolymerization
- 著者名:
Kodama, S. ( Asahi Glass Co., Ltd. (Japan) ) Kaneko, I. Takebe, Y. Okada, S. Kawaguchi, Y. Shida, N. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Ishikawa, S. Toriumi, M. Itani, T. - 掲載資料名:
- Advances in Resist Technology and Processing XIX
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4690
- 発行年:
- 2002
- 巻:
- Part One
- 開始ページ:
- 76
- 終了ページ:
- 83
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444363 [0819444367]
- 言語:
- 英語
- 請求記号:
- P63600/4690
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
国際会議録
The dissolution behavior of tetrafluoroethylene-based fluoropolymers for 157-nm resist materials
SPIE - The International Society of Optical Engineering |