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Electronic structure of chromium aluminum oxynitride by DV-Xa method and photoelectron spectroscopy

著者名:
  • Choi, Y. ( Korea Research Institute of Chemical Technology )
  • Chang, H. ( Korea Research Institute of Chemical Technology )
  • Lee, J.D.
  • Kim, E. ( Korea Advanced institute of Science and Technology )
  • No, K.
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XVI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4689
発行年:
2002
巻:
Part One
開始ページ:
455
終了ページ:
461
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
言語:
英語
請求記号:
P63600/4689
資料種別:
国際会議録

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