Defect printability analysis study using virtual stepper system in a production environment
- 著者名:
Chiou, S.Y. ( United Microelectronics Corp. (Taiwan) ) Lei, H. Liu, W.J. Chu, M.J. Chiang, D. Tuan, S. ( Toppan Chunghwa Electronics Corp. (Taiwan) ) Hong, C.-L. Chang, M. Chen, J.-H. ( Numerical Technologies, Inc. (USA) ) Chan, K.K. Qian, Q.-D. Cai, L. Pang, L.Y. - 掲載資料名:
- Metrology, Inspection, and Process Control for Microlithography XVI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4689
- 発行年:
- 2002
- 巻:
- Part One
- 開始ページ:
- 23
- 終了ページ:
- 34
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- 言語:
- 英語
- 請求記号:
- P63600/4689
- 資料種別:
- 国際会議録
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