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Manufacture of fly-eye mirror in an extreme-ultraviolet lithography illumination system by means of ultraprecision diamond cutting

著者名:
Hashimoto, Y. ( Univ. of Electro-Communications (Japan) )
Takeuchi, Y.
Kawai, T. ( FANUC Ltd. (Japan) )
Sawada, K.
Takino, H. ( Nikon Corp. (Japan) )
Shibata, N. ( Tochigi Nikon Corp. (Japan) )
さらに 1 件
掲載資料名:
Emerging Lithographic Technologies VI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4688
発行年:
2002
巻:
Part Two
開始ページ:
656
終了ページ:
663
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444349 [0819444340]
言語:
英語
請求記号:
P63600/4688
資料種別:
国際会議録

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