First results from the updated NIST/DARPA EUV reflectometry facility

First results from the updated NIST/DARPA EUV reflectometry facility

著者名:

Grantham, S. ( National Institute of Standards and Technology (USA) )
Tarrio, C.
Squires, M.B.
Lucatorto, T.B.

掲載資料名:

Emerging Lithographic Technologies VI

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4688

発行年:

2002

巻:

Part One

開始ページ:

348

終了ページ:

353

総ページ数:

6

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444349 [0819444340]

言語:

英語

請求記号:

P63600/4688

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012519
シリーズID:	PA00000029
会議名:	Emerging lithographic technologies
回次:	2002 : 6th
会議開催地:	Santa Clara, CA, USA
会議開催年:	2002.03.05-2002.03.07

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2 国際会議録 EUV testing of multilayer mirrors: critical issues [6151-15] Hill, S. B., Ermanoski, I., Grantham, S., Tarrio, C., Lucatorto, T. B., Madey, T. E., Bajt, S., Chandhok, M., Yan, P., … SPIE - The International Society of Optical Engineering	8 国際会議録 Design and performance of capping layers for EUV multilayer mirrors Bajt, S., Chapman, H.N., Nguyen, N., Alameda, J.B., Robinson, J.C., Malinowski, M.E., Gullikson, E., Aquila, A., Tarrio, … SPIE-The International Society for Optical Engineering
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4 国際会議録 PHOTOEMISSION MEASUREMENTS OF PHOTOCATHODE MATERIALS IN THE 115-400 A RANGE Grantham, S., Richardson, M. C., Watts, R., Lucatorto, T., Tarrio, C., Pollack, F. MRS - Materials Research Society	10 国際会議録 New infrared beamline at the NIST SURF II storage ring Hight Walker,A.R., Arp,U., Fraser,G.T., Lucatorto,T.B., Wen,J. SPIE-The International Society for Optical Engineering
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6 国際会議録 Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments S. B. Hill, N. S. Faradzhev, C. Tarrio, T. B. Lucatorto, T. E. Madey Society of Photo-optical Instrumentation Engineers	12 国際会議録 Scaling studies of capping layer oxidation by water exposure with EUV radiation and electrons Clift, W.M., Klebanoff, L.E., Tarrio, C., Grantham, S., Wood, O.R., II, Wurm, S., Edwards, N.V. SPIE - The International Society of Optical Engineering

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