Power scale-up of the extreme-ultraviolet electric capillary discharge source
- 著者名:
Fornaciari, N.R. ( Sandia National Labs. (USA) ) Bender, H. Buchenauer, D. Dimkoff, J.L. ( Univ. of California/Berkeley (USA) ) Kanouff, M.P. ( Sandia National Labs. (USA) ) Karim, S. Romeo, C. ( International SEMATECH (USA) ) Shimkaveg, G.M. ( CREOL/Univ. of Central Florida (USA) ) Silfvast, W.T. Stewart, K.D. ( Sandia National Labs. (USA) ) - 掲載資料名:
- Emerging Lithographic Technologies VI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4688
- 発行年:
- 2002
- 巻:
- Part One
- 開始ページ:
- 110
- 終了ページ:
- 121
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444349 [0819444340]
- 言語:
- 英語
- 請求記号:
- P63600/4688
- 資料種別:
- 国際会議録
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