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Power scale-up of the extreme-ultraviolet electric capillary discharge source

著者名:
Fornaciari, N.R. ( Sandia National Labs. (USA) )
Bender, H.
Buchenauer, D.
Dimkoff, J.L. ( Univ. of California/Berkeley (USA) )
Kanouff, M.P. ( Sandia National Labs. (USA) )
Karim, S.
Romeo, C. ( International SEMATECH (USA) )
Shimkaveg, G.M. ( CREOL/Univ. of Central Florida (USA) )
Silfvast, W.T.
Stewart, K.D. ( Sandia National Labs. (USA) )
さらに 5 件
掲載資料名:
Emerging Lithographic Technologies VI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4688
発行年:
2002
巻:
Part One
開始ページ:
110
終了ページ:
121
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444349 [0819444340]
言語:
英語
請求記号:
P63600/4688
資料種別:
国際会議録

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