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Crack-free laser processing of glass substrate and its mechanisms

著者名:
Hong, M.H. ( Data Storage Institute (Singapore) )
Sugioka, K. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Wu, D.J. ( Data Storage Institute (Singapore) )
Wong, L.L.
Lu, Y.F.
Midorikawa, K. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Chong, T.C. ( Data Storage Institute (Singapore) )
さらに 2 件
掲載資料名:
Photon Processing in Microelectronics and Photonics
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4637
発行年:
2002
開始ページ:
270
終了ページ:
279
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443762 [081944376X]
言語:
英語
請求記号:
P63600/4637
資料種別:
国際会議録

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