Background gas effects on structural properties in thin films deposited by pulsed laser deposition

Background gas effects on structural properties in thin films deposited by pulsed laser deposition

著者名:

Yamada, Y. ( Matsushita Electric Industrial Co., Ltd. (Japan) )
Suzuki, N.
Makino, T.
Yoshida, T.

掲載資料名:

Photon Processing in Microelectronics and Photonics

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4637

発行年:

2002

開始ページ:

119

終了ページ:

126

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443762 [081944376X]

言語:

英語

請求記号:

P63600/4637

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012465
シリーズID:	PA00000029
会議名:	SPIE LASE : Photon processing in microelectronics and photonics
回次:	2002
会議開催地:	San Jose, CA, USA
会議開催年:	2002.01.21-2002.01.24

類似資料:

1 国際会議録 Synthesis of quantum nanostructures composed of monodispersed silicon nanoparticies and indium oxide thin films using pulsed laser ablation Suzuki, N., Yamada, Y., Makino, T., Yoshida, T., Seto, T. SPIE-The International Society for Optical Engineering	7 国際会議録 Pt, Pd, Ni metallic thin films deposited by pulsed laser ablation Scarisoreanu, N. D., Nicolae, I., Grigoriu, C., Dinescu, M., Hirai, M., Suzuki, T., Yatsui, K. SPIE - The International Society of Optical Engineering
2 国際会議録 Crystallinities and light-emitting properties of nanostructured SiGe alloy prepared by pulsed laser ablation in inert background gases Yoshida,T., Yamada,Y., Suzuki,N., Makino,T., Orii,M.T., Murakami,K., Geohegan,D.B., Lowndes,D.H., Aziz,M.J. SPIE - The International Society for Optical Engineering	8 国際会議録 Ultraviolet laser damage and optical properties of thin films deposited by reactive-rf-magnetron sputtering Yoshida,K., Kamiya,T., Tochio,N., Ochi,K., Kaku,S., Kamimura,T., Yoshida,H., Okamoto,T. SPIE - The International Society for Optical Engineering
3 国際会議録 Semiconductor nanocrystallite formation using inert gas ambient pulsed laser ablation and its application to light-emitting devices Yoshida,T., Yamada,Y., Suzuki,N., Makino,T., Orii,T., Onai,S. SPIE - The International Society for Optical Engineering	9 国際会議録 Structural and optical properties of thin indium oxide films produced by pulsed laser deposition Stanimirova, T. J., Atanasov, P. A., Dikovska, A. Og., Stankova, N. E., Tonchev, S. H. SPIE - The International Society of Optical Engineering
4 国際会議録 STRUCTURAL ANALYSIS OF CARBON THIN FILMS DEPOSITED BY PULSED LASER DEPOSITION Capano, M.A., Qian, F., Singh, R.K., McDevitt, N.T. Materials Research Society	10 国際会議録 Growth and Electrical Properties of Fe doped (Ba,Sr)TiO3 Thin Films Deposited by Pulsed Laser Deposition Yonezawa, Yoshiyuki, Kato, Megumi, Konishi, Yoshinori, Yoshida, Shizuyasu, Okuda, Nobuhiro, Maeda, Takahiko, Tanuma, … Materials Research Society
5 国際会議録 Structural and optical properties of PLZT thin films deposited by pulsed laser deposition Lancok,J., Jelinek,M., Escoubas,L., Flory,F. SPIE-The International Society for Optical Engineering	11 国際会議録 Optical properties and laser damage of thin films deposited by reactive rf-magnetron sputtering Yoshida,K., Tochio,N., Ohya,M., Ochi,K., Kaku,S., Kamimura,T., Yoshida,H. SPIE - The International Society for Optical Engineering
6 国際会議録 Silicon Nanocrystallite Light Emitting Devices Fabricated by Full Pulsed-Laser-Ablation Process Yamada, Yuka, Makino, Toshiharu, Suzuki, Nobuyasu, Yoshida, Takehito Materials Research Society	12 国際会議録 Optical and Structural Properties of Zinc-Oxide Thin Film Deposited by Pulsed Laser Deposition Ohshima, Tamiko, Thareja, Raj K., Yamagata, Yukihiko, Ikegami, Tomoaki, Ebihara, Kenji Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12