The critical role of metrology in nanotechnology

The critical role of metrology in nanotechnology

著者名:

Schattenburg, M.L. ( Massachusetts Institute of Technology (USA) )
Smith, H.I.

掲載資料名:

Nanostructure Science, Metrology, and Technology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4608

発行年:

2002

開始ページ:

116

終了ページ:

124

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443472 [0819443476]

言語:

英語

請求記号:

P63600/4608

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012436
シリーズID:	PA00000029
会議名:	Nanostructure science, metrology, and technology
回次:	2001
会議開催地:	Gaithersburg, USA
会議開催年:	2001.09.05-2001.09.07

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