Effect of the carbon energy on the growth of silicon carbide films by pulsed laser deposition

Effect of the carbon energy on the growth of silicon carbide films by pulsed laser deposition

著者名:

Yu, W. ( Hebei Univ. (China) )
Zheng, Z.
Han, L.
Fu. G.

掲載資料名:

Semiconductor Optoelectronic Device Manufacturing and Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4602

発行年:

2001

開始ページ:

205

終了ページ:

208

総ページ数:

4

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443410 [0819443417]

言語:

英語

請求記号:

P63600/4602

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012430
シリーズID:	PA00000029
会議名:	Semiconductor optoelectronic device manufacturing and applications
回次:	2001
会議開催地:	Nanjing, China
会議開催年:	2001.11.07-2001.11.09

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