Pulsed laser deposition of crystalline carbon nitride thin films at high substrate temperature

Pulsed laser deposition of crystalline carbon nitride thin films at high substrate temperature

著者名:

Fu, G. ( Hebei Univ. (China) )
Yu, W.
Wang, S.
Zhang, L.
Li, X.

掲載資料名:

Semiconductor Optoelectronic Device Manufacturing and Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4602

発行年:

2001

開始ページ:

201

終了ページ:

204

総ページ数:

4

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443410 [0819443417]

言語:

英語

請求記号:

P63600/4602

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012430
シリーズID:	PA00000029
会議名:	Semiconductor optoelectronic device manufacturing and applications
回次:	2001
会議開催地:	Nanjing, China
会議開催年:	2001.11.07-2001.11.09

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