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Development of novel optical switches based on the MEMS electromagnetic micro-actuator

著者名:
掲載資料名:
Semiconductor Optoelectronic Device Manufacturing and Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4602
発行年:
2001
開始ページ:
14
終了ページ:
17
総ページ数:
4
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443410 [0819443417]
言語:
英語
請求記号:
P63600/4602
資料種別:
国際会議録

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