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Microsensors and actuator arrays based on Pb(Zr,Ti) O3 thin film for AFM data storage

著者名:
Chu, J. ( Univ. of Science and Technology of China (China) )
Lu, J.
Wu, Y.
Huang, W.
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Itoh, T. ( Univ. of Tokyo (Japan) )
Suga, T.
さらに 2 件
掲載資料名:
Micromachining and Microfabrication Process Technology and Devices
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4601
発行年:
2001
開始ページ:
379
終了ページ:
383
総ページ数:
5
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443403 [0819443409]
言語:
英語
請求記号:
P63600/4601
資料種別:
国際会議録

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