Measurement of heat capacity of SnO2 thin films using microhotplate

Measurement of heat capacity of SnO2 thin films using microhotplate

著者名:

Yu, J. ( Dalian Univ. of Technology (China) )
Tang, Z.
Wei, G.
Chan, P.C.H. ( Hong Kong Univ. of Science and Technology )

掲載資料名:

Micromachining and Microfabrication Process Technology and Devices

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4601

発行年:

2001

開始ページ:

234

終了ページ:

237

総ページ数:

4

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443403 [0819443409]

言語:

英語

請求記号:

P63600/4601

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012429
シリーズID:	PA00000029
会議名:	Micromachining and microfabrication process technology and devices
回次:	2001
会議開催地:	Nanjing, China
会議開催年:	2001.11.07-2001.11.09

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