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Fabrication of high-aspect-ratio microstructure on metallic substrate using SU-8 resist

著者名:
Liu, J. ( Shanghai Jiaotong Univ. (China) )
Cai, B.
Zhu, J.
Ding, G.
Zhao, X.
Yang, C.
Chen, D.
さらに 2 件
掲載資料名:
Micromachining and Microfabrication Process Technology and Devices
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4601
発行年:
2001
開始ページ:
200
終了ページ:
204
総ページ数:
5
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443403 [0819443409]
言語:
英語
請求記号:
P63600/4601
資料種別:
国際会議録

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