Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance
- 著者名:
- 掲載資料名:
- Micromachining and Microfabrication Process Technology and Devices
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4601
- 発行年:
- 2001
- 開始ページ:
- 147
- 終了ページ:
- 152
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- 言語:
- 英語
- 請求記号:
- P63600/4601
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
7
国際会議録
Effect of Zn Addition on the Microstructure and Properties of Simulated-Brazing 7072Al Alloy
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
11
国際会議録
Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |