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Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance

著者名:
掲載資料名:
Micromachining and Microfabrication Process Technology and Devices
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4601
発行年:
2001
開始ページ:
147
終了ページ:
152
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443403 [0819443409]
言語:
英語
請求記号:
P63600/4601
資料種別:
国際会議録

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