Experimental investigation of sensitivity dependence with respect to waveguide position on a micromachined diaphragm in a silicon-based integrated optic pressure sensor

Experimental investigation of sensitivity dependence with respect to waveguide position on a micromachined diaphragm in a silicon-based integrated optic pressure sensor

著者名:

Goto, T. ( Niigata Univ. (Japan) )
Yamada, A.
Ohkawa, M.
Sekine, S.
Sato, T.

掲載資料名:

Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4591

発行年:

2001

開始ページ:

337

終了ページ:

344

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443212 [0819443212]

言語:

英語

請求記号:

P63600/4591

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012419
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Electronics and structures for MEMS
回次:	2001 : 2nd
会議開催地:	Adelaide, Australia
会議開催年:	2001.12.17-2001.12.19

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