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Modeling MEMS manufacturability in virtual prototyping CAD tool

著者名:
Sitte, R. ( Griffith Univ. (Australia) )  
掲載資料名:
Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4591
発行年:
2001
開始ページ:
125
終了ページ:
133
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443212 [0819443212]
言語:
英語
請求記号:
P63600/4591
資料種別:
国際会議録

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