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Nanofabrication processes for single-ion implantation of sillicon quantum computer devices

著者名:
McKinnon, P.P. ( Univ. of New South Wales (Australia) )
Stanley, F.E.
Buehler, T.M.
Gauja, E.
Peceros, K.
Macks, L.D.
Mitic, M.
Chan, V.
Dzurak, A.S.
Clark, R.G.
Yang, C.J. ( Univ. of New South Wales (Australia) )
Jamieson, D.N. ( Univ. of Melbourne (Australia) )
Prawer, S.D.
さらに 8 件
掲載資料名:
BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4590
発行年:
2001
開始ページ:
310
終了ページ:
318
総ページ数:
9
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443205 [0819443204]
言語:
英語
請求記号:
P63600/4590
資料種別:
国際会議録

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