Novel Alignment Technologies for Wafer Level Packaging

Novel Alignment Technologies for Wafer Level Packaging

著者名:

Brubaker, C. ( EV Group US, Inc. )
Glinsner, T. ( EV Group )
Lindner, P.
Schaefer, C.
Tischler, M.

掲載資料名:

Proceedings : International Symposium on Advanced Packaging Materials : processes, properties and interfaces, Chateau Elan, Braselton, Georgia, March 11-14, 2001

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4587

発行年:

2001

開始ページ:

594

終了ページ:

599

総ページ数:

6

出版情報:

Washington, DC: IMAPS

ISSN:

0277786X

ISBN:

9780930815646 [0930815645]

言語:

英語

請求記号:

P63600/4587

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012415
シリーズID:	PA00000029
会議名:	International Symposium on Advanced Packaging Materials
回次:	2001
会議開催地:	Braselton, Georgia, USA
会議開催年:	2001.03.11-2001.03.14

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2 国際会議録 Thick resist alignment technology for MEMS and advanced packaging Brubaker, C., Wieder, B., Lindner, P. SPIE-The International Society for Optical Engineering	8 国際会議録 Triple-Stack Anodic Bonding for MEMS Applications Dragoi, V., Glinsner, T., Hangweier, P., Lindner, P. Electrochemical Society
3 国際会議録 Room Temperature Bond for Wafer Level Packaging Luesebrink, Helge W., Dwyer, Steven, Wimplinger, Markus, Brubaker, Chad, Lindner, Paul, Glinsner, Thomas, Thanner, … SPIE-The International Society for Optical Engineering	9 国際会議録 Wafer-level vacuum packaging technology based on selective electroplating Topart, P.A., Leclair, S., Alain, C., Jerominek, H. SPIE - The International Society of Optical Engineering
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5 国際会議録 Application of imprint technologies for creation of micro- and nanoscale pattern Glinsner, T., Beutl, M., Dwyer, S., Lindner, P., Wimplinger, M., Kettner, P., Hanna, S., Leising, G. SPIE - The International Society of Optical Engineering	11 国際会議録 Effects of Bonding Process Parameters on Wafer-to-Wafer Alignment Accuracy in Benzocyclobutene (BCB) Dielectric Wafer Bonding. Niklaus, F., Kumar, R.J., McMahon, J.J., Yu, J., Matthias, T., Wimplinger, M., Lindner, P., Lu, J.-Q., Cale, T.S., … Materials Research Society
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