High-Density, Low-Loss MOS Capacitors for Integrated RF Decoupling
- 著者名:
Roozeboom, F. ( Philips Research ) Elfrink, R.J.G. Rijks, G.S.M., Th Verhoeven, J.F.C.M. Kemmeren, A. van den Meerakker, J.E.A.M. - 掲載資料名:
- Proceedings : International Symposium on Advanced Packaging Materials : processes, properties and interfaces, Chateau Elan, Braselton, Georgia, March 11-14, 2001
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4587
- 発行年:
- 2001
- 開始ページ:
- 477
- 終了ページ:
- 483
- 総ページ数:
- 7
- 出版情報:
- Washington, DC: IMAPS
- ISSN:
- 0277786X
- ISBN:
- 9780930815646 [0930815645]
- 言語:
- 英語
- 請求記号:
- P63600/4587
- 資料種別:
- 国際会議録
類似資料:
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3
国際会議録
ALD Options for Si-integrated Ultrahigh-density Decoupling Capacitors in Pore and Trench Designs
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